Semiconductor

Application conditions within semiconductor manufacturing processes are some of the harshest known. Our seals come into contact with the most aggressive chemical media including alkaline, acids, solvents and gases and are often required to perform at extreme temperatures of 300°C and above.

Approved Manufacturing

ISO9001:2015, ISO 14001:2015 approved and manufacturing IATF16949:2016 and ISO13485:2016 approved.

Product Range

Suitable for applications within semiconductor processes including plasma, deposition, thermal and wet applications.

Engineering & Design

Latest innovations in seal design and Ultra-High Purity (UHP) materials technology.

Quality Assurance

Materials approved to USP Class VI, ISO 10993, UHP, BAM and BfR standards. Cleanroom Class 7 (10,000) manufacturing.

Seals for Semiconductor applications

Our seals are suitable for applications within semiconductor processes including plasma, deposition, thermal and wet applications. These processes present harsh plasma and gas environments, often at extreme temperatures.

– Dry/Wet Etch
– Plasma
– Chemical vapor deposition (CVD)
– Physical vapor deposition (PVD)
– Sub-Fab
– Wet Clean

We have a range of Ultra High Purity (UHP) elastomer compounds suitable for applications where minimal particle generation and outgassing (even at elevated temperatures) are critical. These include a range of UHP perfluoroelastomer materials. We can develop our base elastomer materials to meet particular cleanliness, purity, outgassing or extreme chemical resistance and temperature requirements to suit all plasma, etching and deposition processes.

Our materials are fully compliant with USP Class VI, ISO 10993, UHP, BAM and BfR standards. We can review and recommend material grades for each individual application in order to minimise degradation and to provide maximum seal service life in your application.

Our ISO13485:2016 clean room manufacturing facilities are Class 7 (10,000) manufacturing, and Class 5 (100) inspection, cleaning, & packaging.

Metal Seals

Metal O-ring, C-ring and other profiles are used in extreme application conditions such as high or cryogenic temperatures, aggressive chemicals, ultra-high vacuum, radiation, and gas permeability. Our range of base metals for seal jackets and springs include various grades of stainless steel including 304, 316, 321 and 347 and high strength nickel alloys including Inconel 718, 625, X750 and Hastelloy and Waspaloy. Heat treatments can be applied and specialised platings and coatings are available including; Silver, Gold, Copper, Nickel, Indium, Tin, Lead and PTFE.

PTFE Seals

Our PTFE cap seals are available for rod, piston, and rotary applications, and can be manufactured in a variety of virgin or filled PTFE and elastomer material combinations. Standard seal sizes are for installation in grooves to ISO7425-2 and we can manufacture bespoke sizes and profiles; ranging from 3mm in diameter. PTFE seals with helical, cantilever or canted coil spring energisers can be tailored to any existing customer groove geometry and in numerous jacket material and spring material combinations. Alongside PTFE seals, we offer a range of PEEK and UHMWPE machined components, and PTFE and PEEK back-up rings in a variety of materials and designs including solid, split and contoured profiles.

Bespoke Mouldings & Gaskets

We design and manufacture bespoke mouldings, gaskets and seals in all elastomer materials, and can offer either a full design service or advise on tolerances, hardware interference and material choice for applications where seal design is already underway. We can validate the design with non-linear FEA and can offer rapid prototyping and 3D printing before cutting production tools. Available in all elastomer compounds, including FFKM, and high purity grades that meet international standards such as USP VI, FDA, NSF etc and with options for manufacturing, cleaning and packing in ISO standard cleanrooms.

O-Rings

Manufactured to international standards; AS568, ISO 3601, DIN 3771 and JIS., with metric and non-standard size O-rings also available. Produced in Nitrile (NBR), Perfluoroelastomers (FFKM) Fluorocarbon (FKM), Fluorosilicone (FVMQ), Hydrogenated Nitrile (HNBR), Silicone (VMQ) materials, Ethylene Propylene Diene Monomer (EPDM) elastomers and Polytetrafluoroethylene (PTFE). Our precision O-rings can be manufactured in materials that meet BAM, BfR, UHP, ISO10993-1 and USP Class VI approvals. We can supply O-rings with surface treatments in the form of dry or wet coatings for reducing friction, ease of installation or for colour identification.